| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust cleaner that can remove dust from the surface of a substrate while maintaining the substrate at a desired temperature with a simple constitution, and to provide a pre-heater. SOLUTION: In the dust cleaner, heaters are respectively housed inside dust cleaning rollers 12 which remove dust from the surface of the substrate K heated by means of preheating rollers 11. The heaters prevent the temperature of the substrate K from dropping when the dust cleaning rollers 12 remove the dust by heating the rollers 12. Consequently, the dust cleaner can remove the dust from the surface of the substrate K while maintaining the substrate K at a desired temperature and can stabilize a laminating step performed afterward though the cleaner has a small size.
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