发明名称 Apparatus for the synthesis of layers, coatings or films
摘要 Systems and methods are described for synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.
申请公布号 US2003051664(A1) 申请公布日期 2003.03.20
申请号 US20010957125 申请日期 2001.09.20
申请人 STANBERY BILLY J. 发明人 STANBERY BILLY J.
分类号 C23C14/00;C23C14/06;C23C14/56;C23C16/01;C23C16/30;C23C16/54;C23C26/00;H01L31/032;H01L31/0392;H01L31/18;(IPC1-7):B05C11/00 主分类号 C23C14/00
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