发明名称 |
DIE BONDING METHOD |
摘要 |
<p>PROBLEM TO BE SOLVED: To improve the setting precision of reference height in the thrust mechanism of a die bonder. SOLUTION: A plate PL is kept above the thrust mechanism 2, and the collet C of a suction mechanism 1 is lowered. The collet C is brought into contact with the surface of the plate PL and a thrust needle N is gradually raised. The thrust needle N reaches the rear face of the plate PL and the plate PL is lifted. Thus, the position of the thrust needle N when the position of the collet C starts rising or when it rises by a prescribed distance is stored in the thrust mechanism 2 (die bonder) as reference height.</p> |
申请公布号 |
JP2003086612(A) |
申请公布日期 |
2003.03.20 |
申请号 |
JP20010279065 |
申请日期 |
2001.09.14 |
申请人 |
HITACHI LTD;HITACHI TOKYO ELECTRONICS CO LTD |
发明人 |
HASEBE ARIHIRO;MAKI HIROSHI;TAKANO RYUICHI;KUSUNOKI HIDEKI |
分类号 |
H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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