摘要 |
<p>The snapped-down position of an optical element is defined by its contact with a plurality of kinematic supports (17) on an associated platform (25), or on electrodes (20) placed on that platform. Compliant flexures (60) may be provided in association with one or more kinematic supports (17), such that fine adjustments of the optical element (14) can be made by deflecting the optical element to cause compression of one or more flexures.</p> |