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发明名称
LEITERBAHNSTRUKTUR MIT EINEM DIELEKTRIKUM MIT EINER NIEDRIGEN PERMITIVITÄT
摘要
申请公布号
DE69811379(D1)
申请公布日期
2003.03.20
申请号
DE1998611379
申请日期
1998.03.27
申请人
ADVANCED MICRO DEVICES, INC.
发明人
MAY, CHARLES;CHEUNG, ROBIN
分类号
H01L21/3105;H01L21/312;H01L21/316;H01L21/768;H01L23/532;(IPC1-7):H01L21/768;H01L21/310
主分类号
H01L21/3105
代理机构
代理人
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地址
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