ELLIPSOMETER MIT HOHER RÄUMLICHER AUFLÖSUNG,申请号DE19966022721T-传众专利搜索

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发明名称	ELLIPSOMETER MIT HOHER RÄUMLICHER AUFLÖSUNG
摘要
申请公布号	DE69622721(T2)	申请公布日期	2003.03.20
申请号	DE19966022721T	申请日期	1996.07.03
申请人	SOCIETE DE PRODUCTION ET DE RECHERCHES APPLIQUEES, BOIS-COLOMBES	发明人	PIEL, JEAN-PHILIPPE;STEHLE, JEAN-LOUIS;ZAHORSKI, DORIAN
分类号	G01N21/21;(IPC1-7):G01N21/21	主分类号	G01N21/21
代理机构		代理人
主权项
地址

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