| 摘要 |
PROBLEM TO BE SOLVED: To deposit a DLC (diamond-like carbon) film on the surface of a recording medium, such as optical disc and magnetic tape, for protecting it. SOLUTION: A carbon film is deposited on the surface of a substrate between a couple of electrodes while moving the substrate from one take-up drum to another take-up drum. By applying ultrasonic vibrations to a couple of guide rollers in contact with the substrate when depositing the carbon film, ultrasonic vibrations can be applied to the substrate between the couple of electrodes. By the ultrasonic vibrations of the substrate, fine-grained cluster-like carbon or carbon molecules can be deposited on the surface of the substrate and the resultant carbon film can be made dense and homogeneous.
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