发明名称 SURFACE MODIFICATION METHOD AND APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a surface modification method and an apparatus therefor by which surface treatment for high speed steel or the like can be performed with low energy at a low cost. SOLUTION: As the surface treatment, plasma treatment is performed. In this case, a catalyst 8 is imparted to the surface of the body 6 to be treated, so that activation energy on the treatment is reduced.
申请公布号 JP2003082450(A) 申请公布日期 2003.03.19
申请号 JP20010277942 申请日期 2001.09.13
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ARAI YASUSHI;NISHIHARA MUNEKAZU;SUETSUGU DAISUKE
分类号 C23C8/36;C23C14/14;(IPC1-7):C23C8/36 主分类号 C23C8/36
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