Dicing method and apparatus

摘要

Provision is made of a dicing apparatus, for dicing a plate-like workpiece (20), comprising a disk-like blade (40) which rotates to form a groove (30) in one surface of the workpiece (20); a water discharging portion (50) which discharges water (60) toward the bottom (33) of the groove (30) of the one surface of the workpiece (20) to form a stream of water; and a laser light irradiating portion (70) which irradiates a laser light in the stream of water (60) and impinges the laser light onto the bottom of the groove (33) while reflecting the laser light by an inner wall of the stream of water (60) to remove the portion of the workpiece (20) extending from the bottom (33) of the groove (30) to the other surface of the workpiece (20), so as to dice the workpiece (20).