| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control valve capable of setting a flow rate of fluid with high resolution. SOLUTION: This flow rate control valve is formed by a diaphragm valve comprising a valve rod and a linear motion drive device connected with the other end of the valve rod for advancing or backing the valve rod. The valve rod and the linear motion drive device are connected via a buffer mechanism. A linear motion control device includes an elastic material, an ultrasonic transducer and a sound radiation face along a side face of the valve rod. In this flow control valve comprising the linear motion control device, the elastic material is structured so as to press the ultrasonic radiation face against the valve rod side face when the ultrasonic transducer is not in a state of vibration, and so as to space the ultrasonic radiation face from the valve rod side face using ultrasonic vibration when the ultrasonic transducer is in a state of vibration.
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