| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle position adjusting device that can easily and accurately adjust the positions of air-knife nozzles. SOLUTION: This nozzles position adjusting device is provided with at least a pair of air-knife nozzles 53a and 53b which are respectively positioned on the front and rear surfaces of a substrate G transported in a prescribed direction and blow air upon the substrate G, a microphone 70 which detects the sound produced when the air is blown upon the substrate G from the nozzles 53a and 53b, and a driving section 67 which adjusts the relative position between the nozzles 53a and 53b based on the detected results of the microphone 70. This device is also provided with a controller 30 which controls the driving section 67. Consequently, the relative position between the nozzles 53a and 53b can be adjusted automatically without relying upon the visual inspections performed by a worker and, in addition, the occurrence of position adjustment errors can be prevented.
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