发明名称 METHOD FOR MANUFACTURING PHOTONIC CRYSTAL HAVING DIAMOND STRUCTURE BY INTERFERENCE OF LASER BEAM
摘要 PROBLEM TO BE SOLVED: To easily manufacture a photonic crystal having a diamond structure. SOLUTION: One laser beam is split into five beams of a center beam and four beams parallel to the center beam and separated in an equal distance from the center beam and having an equal distance between the adjacent beams. The five beams are focused by a lens 7 into a focusing region 2. A photoresist material 3 reactive with light is disposed in the focusing region 2 to manufacture the photonic crystal having a diamond structure from the photoresist material 3.
申请公布号 JP2003084158(A) 申请公布日期 2003.03.19
申请号 JP20010274237 申请日期 2001.09.10
申请人 TECHNO NETWORK SHIKOKU CO LTD 发明人 MISAWA HIROAKI;MATSUO SHIGEKI
分类号 G02B6/13;G02B1/02;G02B5/18;G02B6/12;H01S3/00;(IPC1-7):G02B6/13 主分类号 G02B6/13
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