发明名称 SOLUTION FOR FORMING BISMUTH LANTHANUM TITANATE THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a solution for bismuth lanthanum titanate (BLT) thin film formation in which coating characteristics are improved, thin film formation at a temperature as low as <=700 deg.C is made possible and an organic solvent having excellent operability and safety is used. SOLUTION: The solution for bismuth lanthanum titanate (BLT) thin film formation contains propylene glycol derivatives, titanium compounds, bismuth compounds and lanthanum compounds.
申请公布号 JP2003082470(A) 申请公布日期 2003.03.19
申请号 JP20010274127 申请日期 2001.09.10
申请人 KANTO CHEM CO INC 发明人 SHINNAI SATONOBU;KATSURAGI HAYATO
分类号 C30B29/32;C23C18/12;C23C20/08;H01L21/8246;H01L27/105;H01L37/00;H01L41/18;(IPC1-7):C23C20/08 主分类号 C30B29/32
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