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发明名称
Treatment method in glow-discharge plasma and apparatus therefor
摘要
申请公布号
EP0809275(B1)
申请公布日期
2003.03.19
申请号
EP19970303520
申请日期
1997.05.23
申请人
SEKISUI CHEMICAL CO., LTD.
发明人
YUASA, MOTOKAZU;YARA, TAKUYA
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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