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发明名称
REFLECTION REFRACTION IMAGE-FORMING OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS COMPRISING THE OPTICAL SYSTEM
摘要
申请公布号
EP1059550(A4)
申请公布日期
2003.03.19
申请号
EP19990961323
申请日期
1999.12.22
申请人
NIKON CORPORATION
发明人
OMURA, YASUHIRO
分类号
G02B17/08;G03F7/20;(IPC1-7):G02B17/08
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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