| 摘要 |
PROBLEM TO BE SOLVED: To improve detection accuracy and reduce the size of device. SOLUTION: The device has a beam source 3 irradiating a beam light on a part of an object to be measured 2, a mirror part 5 reflecting the beam light 4 attached to the object to be measured 2, a magnifying optical system 6 introducing the beam light 4 reflected by the mirror 5 and magnifying a microargument, and a light receiving part 7 receiving the beam light emitted from the magnifying optical system 6. In the case the object to be measured 2 inclines, the argument of the beam light 4 is amplified by the optical lever function of the mirror part 5 and the magnifying optical system 6.
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