| 发明名称 |
PRODUCING METHOD AND PRODUCING DEVICE OF METAL OXIDE THIN FILM LIBRARY |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device capable of producing two or more kinds of metal oxide thin films in a short time. SOLUTION: This producing method of metal oxide thin film library comprises simultaneously forming dip coating films on two or more base materials by use of two or more kinds of coating solutions. |
| 申请公布号 |
JP2003083855(A) |
申请公布日期 |
2003.03.19 |
| 申请号 |
JP20010279617 |
申请日期 |
2001.09.14 |
| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
MATSUBARA ICHIRO;FUNAHASHI RYOJI |
| 分类号 |
G01N1/28;C01B13/14;C01G51/00;C40B30/00;G01N35/00;G01N35/10;G01N37/00;G02B1/10;(IPC1-7):G01N1/28 |
主分类号 |
G01N1/28 |
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