ULTRAVIOLET-AREA FLUORESCENT MICROSCOPE, FLUORESCENT MATERIAL IDENTIFYING METHOD, AND CLEANING DEGREE EVALUATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a fluorescent microscope in simple structure which can form an image of an ultraviolet area by directly detecting fluorescent light of an ultraviolet part generated by short-wavelength ultraviolet-ray excitation and is adaptive to the ultraviolet area. SOLUTION: This fluorescent microscope is equipped with a light source 1 which emits short-wavelength ultraviolet light, a filter which selects proper wavelengths from the light, an irradiation system which irradiates a sample 3 with the outputted ultraviolet light, an optical system having a Cassegrain mirror as an objective for guiding the fluorescent light of the ultraviolet area emitted by the sample 3 to a detector, a filter 6 which cuts exciting light and discriminates the wavelength of the fluorescent light emitted by the sample, and a CCD camera 7 which has sensitivity high enough for the ultraviolet part to detect the fluorescent light of the ultraviolet area and obtain its fluorescent image.