INFINITESIMAL DISPLACEMENT MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately measure infinitesimal displacement. SOLUTION: A probe 11 and a sound insulation/light shield means 29 is placed around an excitation means 31 for exiting the probe 11 at a resonance point or nearby. The sound insulation/light shield structure let the only tip end side of the probe 11 project from the sound insulation/light shield means 29 to the side of the object 8 to be measured, and instability of contact detection due to noise and the like during measurement and resultant lowering of measurement accuracy are prevented. The excitation means 31 is shaped as a drum and the probe 11 is attached to a fixed plate 31a constituting the drum shape excitation means 31. A piezoelectric element for excitation and detection is arranged around the probe 11.