| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring optical system provided with a compact slit illumination optical system which can obtain illumination of uniform and high quantity of light. SOLUTION: A laser diode (1) radiates a laser beam (L1) spreading in elliptic cone shape and a slit illumination optical system (9) focuses the laser beam (L1) in a slit shape. The slit illumination optical system (9) has a collimator lens (2) converting the laser beam (L1) to parallel light, an anamorphic prism pair (7), enlarging the laser beam (L1) only into a long axis direction of ellipsoid, a cylindrical lens (8) focusing the laser beam (L1) only into the minor axis direction of ellipsoid, and a half wave plate (5) converting the polarization direction of the laser beam (L1) so that the transmittance of the laser beam passing into the prism surface of the anamorphic prism pair (7) becomes maximum.
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