METHOD FOR PRODUCING MICRO CERAMIC TUBE BY IRRADIATION OF RADIATION ON SILICON-BASED POLYMER

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a silicon carbide (SiC) or silicon nitride (SiN) micro ceramic tube having a diameter of severalμm to several hundredμm. SOLUTION: This method for producing the micro SiC ceramic tube comprises oxidizing and infusibilizing an organic silicon polymer fiber with ionizing radiations, extracting the uncross-linked portion of the central portion of the fiber with an organic solvent to form the hollow silicon polymer fiber, and then calcining the fiber in an inert gas to produce the ceramic tube.