| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean space unit which can be easily disassembled, transferred and installed. SOLUTION: The clean space unit comprises the sealed case 3 having the suction hole 1 and the exhaust hole 2, the prefilter 4 disposed at the suction hole side in the case 3 to purify the sucked air to a predetermined level, the fan filter unit 5 for purifying the air purified by the prefilter to a cleanliness required for a high cleanliness work and blowing the clean air from the hole 2, and the cover 7 for shutting off the space formed of the case 3 and the frame 6 from atmosphere, thereby forming the high cleanliness working space.
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