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发明名称
Method and apparatus for controlling the growth of thin film during deposition process by measuring the rate of change of optical thickness of the thin-film
摘要
申请公布号
GB2379735(A)
申请公布日期
2003.03.19
申请号
GB20010022197
申请日期
2001.09.14
申请人
* QINETIQ LIMITED
发明人
COLIN JAMES * FLYNN
分类号
G01B11/06;(IPC1-7):G01B9/02
主分类号
G01B11/06
代理机构
代理人
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