| 摘要 |
PROBLEM TO BE SOLVED: To provide an excellent angular velocity sensor dispensing with the fine adjustment of resonance frequency in two directions performed heretofore by a vibration gyroscopic sensor and capable of being decreased in cost. SOLUTION: The angular velocity sensor is equipped with a vibrator having a rectangular short strip-shaped plate 4 and the load masses fixed to both ends of the plate, the driving piezoelectric element 2 and detection piezoelectric element 3 arranged on the surface of the plate, a drive source 6 for supplying a drive signal to the driving piezoelectric element to generate bending vibration in the plate, and a phase comparator 7 for detecting the phase difference between the detection signal outputted by detecting the bending vibration by the detection piezoelectric element and the drive signal to output a phase detection signal. The rotary direction and angular velocity of the rotary motion in the short strip and short side direction of the plate of the vibrator are detected. |
