FIXING METHOD FOR MULTI-LAYER FILM SUBSTRATE, MULTI-LAYER FILM SUBSTRATE, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To remove deformation in a face shape of a multi-layer film substrate even when the face shape is deformed in fixation of a metal frame onto the multi-layer film substrate. SOLUTION: This multi-layer film substrate fixing method related to the present invention is a method for fixing the metal frame 2 onto the multi-layer film substrate 1 as an optical component. In the method, metal is deposited between the metal frame 2 and the multi-layer film substrate 1 to fix the metal frame to the multi-layer film substrate. The method for depositing the metal is an electroless plating method, and the metal is an electroless deposition film 3.