AIR CONDITIONING SYSTEM FOR HIGH TEMPERATURE AND HIGH HUMIDITY

摘要

PROBLEM TO BE SOLVED: To sustain specified temperature and humidity in a high temperature high humidity chamber without requiring a cooler dedicated to dehumidification. SOLUTION: Air from a clean room 1 and return air from a high temperature high humidity chamber R are mixed in a processing chamber 21, heated by means of an electric heater 23, and humidified in the humidifying section 25a of an electric heating steam humidifier 25 before being supplied to the high temperature high humidity chamber R through a HEPA filter 27.