| 摘要 |
PROBLEM TO BE SOLVED: To provide an energy measuring device for an ultraviolet laser device capable of always detecting stably the output of a laser beam. SOLUTION: This energy measuring device for the laser device is equipped with a photodetector 37 for detecting the output of the laser beam and a diffusion plate 36 arranged in front of the photodetector 37, for diffusing the laser beam entering the photodetector 37. The measuring device is characterized by using the diffusion plate wherein the change of the transmissivity of the diffusion plate 36 is approximately saturated by being irradiated beforehand with ultraviolet light.
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