| 摘要 |
PROBLEM TO BE SOLVED: To provide a material supplying device suitable for supplying a predetermined amount of material intermittently. SOLUTION: The material supplying device supplies the material M to a third chamber 3C through a first chamber 1C and a second chamber 2C, and includes a first valve 1V positioned between the first chamber 1C and the second chamber 2C for maintaining air tightness between the first chamber 1C and the second chamber 2C in a closed state, a second valve 2V positioned between the second chamber 2C and the third chamber 3C for maintaining air tightness between the second chamber 2C and the third chamber 3C in a closed state, and a third valve 3V for preventing the material from moving from the first chamber 1C to the second chamber 2C before the first valve 1V maintains the air tightness between the first chamber 1C and the second chamber 2C.
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