| 摘要 |
PURPOSE: To provide a suction fixing device and its manufacturing method, in which fixing, correction, carriage, and the like, can be performed without causing such a trouble as the generation of particles. CONSTITUTION: In the suction fixing device, upper surface of a dielectric 13 constituting a basic body serves as a surface for suction-fixing a planar sample 1. Protrusions or grooves are formed on the suction fixing surface to obtain a protruding/recessed surface where the top face 24 of the protrusion 15 serves as the holding surface of the planar sample 1. Furthermore, the top face 24 and the side face 25 of the protrusion 15 are polished along with the bottom face 27 of the recess 26. |
