| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device and method capable of positioning an object much more rapidly. SOLUTION: In the positioning device and method which move an object to a desired position, the object is moved at a desired velocity and acceleration, the acceleration/deceleration time of the object and the staring timing of deceleration are adjusted according to the vibration period of the remaining vibration occurring immediately after the object is positioned for canceling the remaining vibration. |
