| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a visual inspection apparatus using an electron beam by which a defect hardly detectable by an optical image is detected with high accuracy by using an electron beam image, and by which a dose amount and an inspection speed as an inspection-apparatus single body as becoming a problem at this time can be controlled by a simple operation and with high accuracy. SOLUTION: In the inspection apparatus, the defect in a sample is detected on the basis of a detection signal of secondary charged particles generated by scanning the electron beam. The apparatus comprises a means which decides the inspection speed and a primary electron dose. The apparatus is provided with a function by which, when one from among both is decided, the other is automatically adjusted according to its result.</p> |
