| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry-Perot filter in element structure which can make an initial gap large and is easy to manufacture. SOLUTION: The Fabry-Perot filter which has a fixed mirror and a movable mirror arranged opposite the fixed mirror across a size-variable gap and selects and transmits light with arbitrary desired wavelength corresponding to the gap has a fixed substrate where the fixed mirror is formed, a movable substrate which is connected to the fixed substrate across spacers, a plurality of hinge parts which are formed thinly by etching a plural places of the surface of the movable substrate on the opposite side from the fixed substrate into a groove shape, a projection part which is formed thickly between the plurality of hinge parts of the movable substrate and connected to the hinge parts and where the movable mirror is formed, and a metal heater which is connected to the hinge parts to form a bimetal structure; and the metal heater is electrified to generate heat and the movable substrate is driven through the bimetal effect between the hinge parts and metal heater to vary the gap.
|
