发明名称 Illumination apparatus
摘要 <p>An illumination apparatus includes a first light integrator including a first optical element that has a section vertical to an optical axis and defined by a plurality of first sides, the first light integrator uniformly illuminating an illuminated plane, and a second light integrator for uniformly illuminating the first light integrator (156) so that an outline of an illumination range (138) in which light incident upon the first light integrator illuminates the light incidence plane of the first light integrator includes a plurality of second sides each of which is not parallel with any one of the first sides. &lt;IMAGE&gt;</p>
申请公布号 EP1293834(A2) 申请公布日期 2003.03.19
申请号 EP20020256342 申请日期 2002.09.12
申请人 CANON KABUSHIKI KAISHA 发明人 MORI, KEN-ICHIRO
分类号 G03F7/20;H01L21/027;(IPC1-7):G03F7/20 主分类号 G03F7/20
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