| 摘要 |
An excimer laser device which neither corrodes due to a laser gas nor contaminates the laser gas is provided. For this purpose, in an excimer laser device including a cross flow fan (1) disposed in a chamber (2) for circulating a laser gas, magnetic bearings (12, 12) having outer ring magnet coils (11, 11) and inner ring magnetic substances (10, 10) for rotatably supporting a rotating shaft (9) by magnetic force, and a motor (49) having a stator (47) and a rotor (48) for directly and rotationally driving the cross flow fan (1), the outer ring magnet coils (11, 11), the inner ring magnetic substances (10, 10), the rotor (48), and the stator (47) are respectively housed in shielded spaces shielded from the laser gas.
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