发明名称 Apparatus and method for making free standing diamond
摘要 A mandrel for use in a diamond deposition process has surfaces with different diamond adhesion properties. According to one embodiment, a mandrel is provided and has first and second surfaces on which a diamond film is deposited, with the second surface forming a perimeter around the first surface. The first surface of the mandrel has a first diamond bonding strength which is less than a second diamond bonding strength of the second surface. In an embodiment for forming a cup-shaped diamond film, the mandrel is a titanium nitride (TiN) coated molybdenum (Mo) substrate having a stepped solid cylindrical shape with a central mesa having a side wall or flank. The side wall is etched near the top surface of the mesa to expose a molybdenum band and to form a second surface which bounds the TiN first surface. When the molybdenum band loses efficiency as a result of diamond particles remaining in the molybdenum band after a diamond deposition procedure, a second strip of the TiN coating adjacent to the first strip may be etched or machined to expose a second band of molybdenum. Other embodiments of the invention include machining the molybdenum band on the mesa top surface, machining a stepped molybdenum band, using a separate and detachable molybdenum foil or wire applied to grooves in the mandrel, and forming radial lines or patches on the surface of the mandrel.
申请公布号 US6533869(B1) 申请公布日期 2003.03.18
申请号 US19950388788 申请日期 1995.02.15
申请人 SAINT-GOBAIN/NORTON INDUSTRIAL CERAMICS CORPORATION 发明人 FELLBAUM RANDY D.;ULBRICH VOLKER R.
分类号 C30B29/04;C04B35/58;C23C16/01;C23C16/26;C23C16/27;(IPC1-7):C23C16/00 主分类号 C30B29/04
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