COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus capable of bonding liquid drops to the surface of a substrate in high density. SOLUTION: The coating apparatus is constituted so as to eject liquid drops L to the surface of the substrate W from an orifice while feeding the substrate W to coat the substrate W and equipped with a shaking arm 8 shaken along the direction crossing the feed direction of the substrate W at a right angle, a plurality of ink jet type heads 13 provided over the almost total length in the longitudinal direction of the shaking arm and a plurality of orifices bored in the heads at a predetermined interval along the direction crossing the feed direction of the substrate W at a right angle.