| 摘要 |
PROBLEM TO BE SOLVED: To provide a manipulator for stably driving a driving member in a vacuum tank from the outside of the vacuum tank. SOLUTION: All driving parts 1 becoming drivable by feeding air from a driving source 2 installed at the outside of the vacuum tank 17 through a pipe 3 are installed at the inside of the vacuum tank. A solenoid valve 4 is switched to air introduction and air is introduced into a sealing chamber at the inside of a cylinder body 7 from the driving source 2. A valve plate 13 is forwardly pushed by a pressure of this air and a driving shaft 12 fixed thereto also advances. When the driving shaft 12 advances by a constant distance, one end of a spring press 15 engaged with the driving shaft 12 abuts on a pivotal support part 8 and the advancement of the valve plate 13 and the driving shaft 12 is stopped. When the driving shaft 12 is returned to an original position, the solenoid valve is switched to air discharge and the air introduced into the cylinder body 7 is discharged. Thereby, by resilient force of the compressed spring, the spring press 15 is rearwardly pushed back and the driving shaft 12 is also retreated and returned to the original position.
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