ULTRAFINE PARTICLE GENERATOR

摘要

PROBLEM TO BE SOLVED: To provide an ultrafine particle generator capable of controlling the particle size and the generation amount of ultrafine particles having uniform particle sizes. SOLUTION: The ultrafine particle generator 2 comprises a fine particle generating nozzle 12 crushing a liquid into fine particles by a gas to generate liquid fine particles, a separation container 10 for separating fine particles generated by the fine particle generating nozzle, and a discharge unit 28 discharging ultrafine particles separated from fine particles in the separation container. The ultrafine particle generator 2 further comprises a particle size setting means 44a for setting the particle size of ultrafine particles discharged from the discharge unit, a particle size detecting means S1 for detecting the particle size of ultrafine particles discharged from the discharge unit, and a first gas pressure controlling means 42 for controlling the pressure of a gas supplied to the fine particle generating nozzle so that the particle size of ultrafine particles detected by the particle size detecting means is consistent with the particle size of ultrafine particles set by the particle size setting means.