| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge plasma treating apparatus capable of coping even with the treatment of a large surface area base material, or the like, by moderating the drift of a gas introduced between electrodes in the remote type discharge plasma treating apparatus. SOLUTION: In the discharge plasma treating apparatus in which glow discharge plasma is produced by introducing a treating gas between the opposed electrodes and applying electric field, the introduction of the treating gas between the opposed electrodes is uniformly performed by using a flow straightening mechanism provided with a rotary blade. |
