LIQUID TRANSFER PREVENTING METHOD IN TREATMENT OF SUBSTRATE WITH CHEMICAL LIQUID AND LIQUID TRANSFER PREVENTING APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To prevent the transfer of a liquid agent to the outside of a liquid agent treatment chamber (e) through a substrate 10 when the substrate 10 treated by spraying the liquid agent on the substrate from a liquid agent nozzle 3 in the liquid agent treatment chamber (e) is fed in the direction shown by an arrow (b) to be fed out to the outside from the liquid agent treatment chamber (e). SOLUTION: A liquid transfer preventing nozzle 4 turned in an obliquely downward direction is provided in the vicinity of a feed-out port (j) where the substrate 10 is fed out from the liquid agent treatment chamber (e) and a liquid agent of the same kind as the above mentioned liquid agent is turned toward the inside of the liquid agent treatment chamber (e) to be obliquely sprayed on the surface of the substrate 10. By this constitution, the flow turned toward the inside of the liquid agent treatment chamber (e) along the surface of the substrate 10 is generated to prevent liquid transfer.