发明名称 Laser for generating narrow-band radiation
摘要 A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle gammaa,gammab) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.
申请公布号 USRE38039(E1) 申请公布日期 2003.03.18
申请号 US20000584420 申请日期 2000.06.01
申请人 LAMBDA PHYSIK AG 发明人 KLEINSCHMIDT JUERGEN;HEIST PETER
分类号 H01S3/134;H01S3/08;H01S3/137;H01S3/225;(IPC1-7):H01S3/08 主分类号 H01S3/134
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