| 摘要 |
A micromachine package includes a micromachine chip mounted as a flip chip to a substrate. The micromachine chip includes a micromachine area and bond pads formed on a front surface of the micromachine chip. The substrate includes traces formed on an upper surface of the substrate. The bond pads are coupled to the traces by bumps, e.g., formed of solder. The micromachine package is sealed with a package body formed from a cured limited flow liquid encapsulant to protect the micromachine area from the ambient environment. More particularly, the micromachine chip, the package body and the substrate define a sealed cavity, and the micromachine area is located within the sealed cavity.
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