发明名称 |
Use of water and acidic water to purify liquid MOCVD precursors |
摘要 |
This invention relates to an improvement in a purification process for producing those liquid copper based complexes of beta-diketones and, particularly the monovalent copper complexes of beta-diketones, which are suited for application by chemical vapor deposition in the electronics industry. In the basic process for preparing a copper based complex, a reactive copper compound is reacted with a fluorinated beta-diketonate and an organo source such as an olefinic source or one having acetylenic unsaturation. Purification is effected by contacting reaction product with a double deionized deoxygenated water source and preferably an acid/water source. An aqueous layer and an organic layer are formed with the aqueous layer containing byproducts and the organic phase containing product. |
申请公布号 |
US6534666(B1) |
申请公布日期 |
2003.03.18 |
申请号 |
US20010037739 |
申请日期 |
2001.12.27 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
ZORICH ROBERT SAM;THURMOND JAMES RICHARD;ROBERTS DAVID ALLEN |
分类号 |
B01D11/04;C07C45/77;C07C45/80;C07C45/81;C07C49/92;C07F1/08;C07F7/08;(IPC1-7):C07F1/08 |
主分类号 |
B01D11/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|