| 摘要 |
PROBLEM TO BE SOLVED: To remove (clean) an electrically conductive material filmed over or stuck to a bevel part, etc., of a substrate and to machine an outer peripheral part of the substrate by applying electrochemical machining in place of, for example, conventional general etching by electrochemical action. SOLUTION: This electrochemical machining device is furnished with a plurality of electrodes 36 accumulated with an insulating material 34 between them and has an electrode part 32 having a holding part 38 to face against an outer peripheral part of a work W, an ion exchanger 48 arranged on the holding part 38 of the electrode part 32, a liquid supply part 50 to supply liquid to the holding part 38 of the electrode part 32 and an electric source 40 to apply voltage to the electrodes 36 of the electrode part 32 so that the electrodes 36 become different polarities from each other.
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