发明名称 Method of manufacturing a flash memory having a select transistor
摘要 According to the present invention, there is disclosed a 2-transistors type flash memory, wherein a memory-transistor is composed of layers of structure consisting of a floating gate and a control gate separated by a first insulating film; and, at least, a gate electrode of a select-transistor is composed of a single layer of a polysilicon film, which is formed from the same layer as the floating gate electrode of the memory-transistor and then doped to have an enhanced dopant concentration by ion implantation performed in the step of forming source-drain regions of the transistors.
申请公布号 US6534355(B2) 申请公布日期 2003.03.18
申请号 US20010950870 申请日期 2001.09.12
申请人 NEC CORPORATION 发明人 ITO HIROSHI;SAKAI ISAMI
分类号 H01L21/8234;H01L21/8247;H01L27/088;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/823 主分类号 H01L21/8234
代理机构 代理人
主权项
地址