UPPER ELECTRODE LIFT APPARATUS FOR SEMICONDUCTOR ETCHING APPARATUS

摘要

PURPOSE: An upper electrode lift apparatus for a semiconductor etching apparatus is provided to improve quality and yield of a semiconductor device by minimizing an abrasion phenomenon occurring in driving a motor. CONSTITUTION: The motor(152) is provided which supplies driving force. A motor axis(154) has a cutting surface, installed in the motor. A sprocket(156) vertically transfers the vertical axis of the upper electrode(120) according as the motor revolves or counter-revolves, having a coupling hole inserted into the motor axis. The coupling hole of the sprocket has a cutting surface corresponding to the cutting surface of the motor axis.