SOURCE TEMPERATURE CONTROLLER HAVING DEVICE FOR MEASURING REMAINING AMOUNT

摘要

PURPOSE: A source temperature controller having a device for measuring remaining amount is provided to accurately measure an amount of POCL3 liquid remaining in a POCL3 container. CONSTITUTION: An aluminum housing(100) contains a POCL3 liquid container(110). The aluminum housing includes level sensors(120), a cooler(140), a heater(150), and a fan motor(160). An electronic scale(170) is installed at a bottom of the aluminum housing on which the POCL3 liquid container is put. The electronic scale accurately weighs the weight of POCL3 liquid contained in the POCL3 liquid container to transmit a measuring signal to display module electronics.