SUBSTRATE PROCESSING SYSTEM FOR MANAGING APPARATUS INFORMATION OF SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate processing system for managing apparatus information of a substrate processing apparatus is provided to efficiently back up information for controlling the operation of the substrate processing apparatus, without burdening a user. CONSTITUTION: A substrate processing apparatus(1) and an information storage server(2) are connected with each other through a network(6). A storage part of the substrate processing apparatus(1) stores setup information and a control program, for controlling the operation of the substrate processing apparatus(1) according to setup information and the control program. The substrate processing apparatus(1) has a schedule function, for transmitting a backup instructional command according to a schedule. In response to the instructional command, the substrate processing apparatus(1) generates duplicate information of specified information stored in the storage part, and transfers duplicate information to the information storage server(2) through the network(6). The information storage server(2) stores received duplicate information in a hard disk as backup data. The information storage server(2) also stores only differential data of duplicate information.