| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck difficult to produce nonconformity such as peeling of an insulating layer even when a thickness of the insulating layer is 0.1-4.0 mm. SOLUTION: The electrostatic chuck is provided with a chuck body 1 composed of a sintered body including aluminum nitride, and an electrode 2 embedded in the chuck body 1. The electrostatic chuck provided with mutually opposite base layers 11 sandwiching the electrode 2 by the chuck body 1 and the insulating layer 12 whose thickness is 0.1-4.0 mm is made a structure composed of a flat plate-like punching metal.</p> |
