| 摘要 |
PROBLEM TO BE SOLVED: To reduce the cost and improve performance of an aligner, without influencing the cost and the performance of a laser unit on a required cost per aligner or the performance of the aligner. SOLUTION: A plurality of laser units L1, L2 are synchronized with pulse signals at a fixed frequency fed from a pulse signal generator P and actuated to emit pulses of light, resulting in a plurality of light beams to be combined into a single light beam. A plurality of half-mirrors H1, H2, H3 divide the combined beam into a plurality of light beams which are then introduced individually in illumination optical systems of a plurality of aligners E1, E2, E3. The aligners E1, E2, E3 transfer images on an original plate to a photosensitive substrate with exposure rates being controlled individually, based on the pulse signals of the fixed frequency.
|
